Stress sensors using soft-MEMS



To develop stress sensors based on novel soft-MEMS approach critical to detect tactile information. The focus is on arrays of solid-state force/pressure sensors embedded in PDMS. The piezoresistive sensor will consist of five cantilever type sensing elements connected in a Wheatstone bridge configuration to measure stress and shear forces. The stress will be a direct consequence of the membrane deflection in response to an applied pressure. The design of a membrane stress sensor involves working on the thickness, geometrical dimensions of membrane, and positioning of piezo resistors on membrane to achieve optimum sensitivity. These will be investigated together with the quantitative analysis of the force distribution. 

Expected Results

Cantilever based sensors embedded in soft substrates, capable of detecting shear force and slip.

Planned secondments

UoG: for nanofabrication training

UoG: to attend courses on soft skills and integration on soft substrates

KUL: to evaluate the sensor with electronic interface


Host institution: Fondazione Bruno Kessler

Enrolments (in Doctoral degree): University of Glasgow


Leandro Lorenzelli, Ravinder Dahiya

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Position filled

This project is founded by the EU Horizon 2020 research and innovation programme under grant agreement No 861166 (INTUITIVE)